In these ngrams, we can see the slow development of this new lexicon of ideas and terms referring to change.  Clearly, a great deal takes place after 1850, but it is in the first 50 years of the century that these new terms are first forged and then become a wider currency within the European world. 

(The term liberal has not been included because it has much wider use throughout the 17th and 18th centuries and it a feature of character or an understanding of culture and the arts, more than a political badge).  LIberalism, on the other hand, is very much the product of the Spanish world, starting with the Constitution of Cadiz in 1812 and the subsequent two years of rule, before the reassertion of Ferdinand's heavy handed monarchy; and then most strikingly in 1820-23 - the trienio liberal - also forcibly shut down by Ferdinand (with French help)).